Cu 4O3 thin films deposited by non-reactive rf-magnetron sputtering from a copper oxide target
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AlNXOY THIN FILMS DEPOSITED BY DC REACTIVE MAGNETRON SPUTTERING
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ژورنال
عنوان ژورنال: Revista Mexicana de Física
سال: 2021
ISSN: 2683-2224,0035-001X
DOI: 10.31349/revmexfis.67.495